MetOne 3400 系列气体减压阀
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MetOne 3400系列专用高压气体扩散器（减压阀）
高压气体经过 Diffuser (30~150 Psi) 调整至常压状态后再经由颗粒计数器读出目前气体中粒子分布情形 ，可量测范围0.1um-5um。应用于半导体厂、光电厂中高压气体如PN2、O2、H2、CDA等。
高压气体经过 Diffuser (30~150 Psi) 调整至常压状态后再经由颗粒计数器读出目前气体中粒子分布情形 ，可量测范围0.1um-5um。应用于半导体厂、光电厂中高压气体如PN2、O2、H2、CDA等。
Specifications
Specifications are subject to change without notice.
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Specification |
Details |
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Dimensions (L x D) |
19.1 x 5.7 cm (7.5 x 2.25 in.) |
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Material |
Nickel-plated aluminum and stainless steel |
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Weight |
0.57 kg (1.25 lb) |
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Pressure range |
0.1 CFM, 1.0 CFM or 50 LPM diffuser: 206–1034 kPa (30–150 psig) 100 LPM diffuser: 344–1034 kPa (50–150 psig) |
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Flow rate |
0.1 CFM, 1.0 CFM, 50 LPM or 100 LPM |
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Sample gas |
Dry, inert and non-toxic |
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Inlet connector |
Stainless #4 VCR fitting (modified) |
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Outlet connector |
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Orifice material |
Sapphire (at the inlet end) |
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Exhaust port |
¼-in. NPT |
